Liquid Cooling Plate Helium Leak Detection System

During leak detection, first place the workpiece into the vacuum chamber.

After completing the connections, press the start button: the vacuum chamber door will close automatically, valve V3 will open, and all other valves will close to pre-evacuate the vacuum chamber. Simultaneously with the pre-evacuation of the vacuum chamber, valve V1 opens to fill the workpiece with high-pressure gas at the set pressure, which is maintained for several seconds.

If there is no gross leak in the workpiece, the pressure will remain stable. If the pressure fails to hold within the set time, it indicates a gross leak in the workpiece, and the system will automatically trigger an audible and visual alarm. In this case, stop the system, press the reset button, open the chamber door, and remove the workpiece.

If no gross leak is detected, the system will automatically open valve V4 to evacuate the workpiece, with both the vacuum chamber and the workpiece being evacuated simultaneously.

When the pressure in the vacuum chamber reaches 30 Pa and the pressure in the workpiece reaches 2000 Pa, the leak detector will start automatically to measure and record the helium background level inside the vacuum chamber. During leak detection, the system subtracts this background value from the measured leak rate to ensure the displayed value reflects the actual leak rate of the workpiece. Valve V4 is then closed, and valve V5 opens to fill the workpiece with helium for fine leak detection.

The system will automatically determine the workpiece's qualification status and issue a prompt or an audible and visual alarm accordingly.

After the completion of fine leak detection, the system automatically enters the recovery process.

Once recovery is finished, the system closes valves V1, V3, V4, and V5, pauses the leak detector, opens valves V6 and V7 to vent the vacuum chamber and the workpiece, and the workpiece can be removed to conclude the leak detection cycle.